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  Ion implantation as a method of forming nano-structered layers
  Z. Werner1,2 1The Andrzej Soltan Institute for Nuclear Studies, Swierk, Poland 
2Institute of Physical Chemistry, Polish Academy of Sciences, Warsaw Poland
  Topics 
    
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The paper reviews the reasons behind an interest in studying the properties of nanostructured layers in the context of using ion implantation as a method of creating layers with high concentration of metal or semiconductor nanoclusters. Layers of metallic nanoclusters in transparent materials exhibit strong non-linear optical properties thus making them suitable candidates for photonic materials. On the other hand, semiconducting nanoclusters are studied as candidates for materials with strong luminescence coupled with a possibility of easy tuning the emitted wavelength.
Peculiarities and advantages of ion implantation as a versatile and flexible method of forming such nanostructured layers are discussed. The usefulness of this method is presented on such examples as:
 
-	implanted nanoclasters of Au , Ag, and Cu in MgO and fused silica, 
-	diamond nanoclusters in fused silica, 
-	nanoclusters of compound semiconductors in silica, 
-	nanocrystals with "core-shell" structure formed by co-implantation. 
Current problems and future prospects of using ion implantation in the domain of nanotechnology are presented.
 
 
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